|
项目 Item |
内容 Content |
|---|---|
| 标准代码 Standard Code |
GB/T 29507-2013 |
| 标准类别 Standard Class |
GB |
| 标准中文名称 Standard English Title |
硅片平整度、厚度及总厚度变化测试 自动非接触扫描法 |
| 标准英文名称 Standard Chinese Title |
Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning |
| 订购 Order |
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