中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 34899-2017
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy 微机电系统(MEMS)技术 基于拉曼光谱法的微结构表面应力测试方法
Issued Date:2017-11-01
Implemented Date:2018-05-01
Issued by:
The Standardization Administration of the People's Republic of China